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Effect of Stress on Aluminum Induced Crystallization of Magnetron Sputtered Amorphous Silican Thin Film.

著者名:
掲載資料名:
Fullerenes and nanotubes, materials for the new chemical frontier : proceedings of the International Symposium on Fullerenes, Nanotubes, and Carbon Nanoclusters
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2004-12
発行年:
2005
開始ページ:
313
終了ページ:
320
総ページ数:
8
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774512 [1566774519]
言語:
英語
請求記号:
E23400/200412
資料種別:
国際会議録

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