(4.12) 7:58 - 8:01 PM - SIMS Depth Profiling of Band As Implants in Si1_xGex and Strained Si/Si1_xGex
- 著者名:
Bennett, J. Kohli, P. Wise, R. Rodder, M. Yu, S. Cleavelin, R. Pas, M. Braithwaite, G. Currie, M.T. Lochtefeld, A. (SEMATECH) - 掲載資料名:
- SiGe: materials, processing, and devices : proceedings of the First international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2004-07
- 発行年:
- 2004
- 開始ページ:
- 239
- 終了ページ:
- 242
- 総ページ数:
- 4
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774208 [1566774209]
- 言語:
- 英語
- 請求記号:
- E23400/200407
- 資料種別:
- 国際会議録
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