Modeling of Internal Gettering for Metal Impurities by Oxide Precipitates in CZ-Si Wafer
- 著者名:
- Sueoka, K.
- 掲載資料名:
- High purity silicon VIII : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2004-05
- 発行年:
- 2004
- 開始ページ:
- 176
- 終了ページ:
- 187
- 総ページ数:
- 12
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774185 [1566774187]
- 言語:
- 英語
- 請求記号:
- E23400/200405
- 資料種別:
- 国際会議録
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12
国際会議録
Metallic impurities and their impact on the formation of internal gettering layer in silicon wafers
Electrochemical Society |