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Reliability Challenges for sub-90nm Technology Dielectrics

著者名:
Puchner, H.  
掲載資料名:
Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2004-04
発行年:
2004
開始ページ:
239
終了ページ:
249
総ページ数:
11
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774178 [1566774179]
言語:
英語
請求記号:
E23400/200404
資料種別:
国際会議録

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