Hydrogen-plasma-enhanced thermal donor formation in n-type high-resistivity MCZ silicon
- 著者名:
Simoen, E. Huang, Y. L. Claeys, C. Raft, J. M. Job, R. Fahrner, W. R. Versluys, J. Clauws, P. - 掲載資料名:
- Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2005-10
- 発行年:
- 2005
- 開始ページ:
- 165
- 終了ページ:
- 175
- 総ページ数:
- 11
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774284 [1566774284]
- 言語:
- 英語
- 請求記号:
- E23400/200510
- 資料種別:
- 国際会議録
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