Ge pile-up and defect formation during dry oxidation of SiGe
- 著者名:
Daval, N. Guiot, E. Bourdelle, K. K. Kennard, M. Cayrefourcq, I. Akatsu, T. Mazure, C. Cerva, H. Rucki, A. - 掲載資料名:
- Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2005-10
- 発行年:
- 2005
- 開始ページ:
- 42
- 終了ページ:
- 51
- 総ページ数:
- 10
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774284 [1566774284]
- 言語:
- 英語
- 請求記号:
- E23400/200510
- 資料種別:
- 国際会議録
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