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Liquid-delivery MOCVD of SBT thin films using novel bismuth precursors

著者名:
Silinskas, M.
Lisker, M.
Matichyn, S.
Burte, E. P.
Hyeon, J.
Lorenz, V.
Edelmann, F.
さらに 2 件
掲載資料名:
EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2005-09
発行年:
2005
開始ページ:
881
終了ページ:
888
総ページ数:
8
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774277 [1566774276]
言語:
英語
請求記号:
E23400/200509
資料種別:
国際会議録

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