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Deposition and characterization of PECVD phosphorus doped silicon oxynitride layers for integrated optics applications

著者名:
掲載資料名:
EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2005-09
発行年:
2005
開始ページ:
457
終了ページ:
464
総ページ数:
8
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774277 [1566774276]
言語:
英語
請求記号:
E23400/200509
資料種別:
国際会議録

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