Selective atomic layer deposition of titanium oxide on silicon and gold with patterned self-assembled monolayers
- 著者名:
- Sung, M. M.
- 掲載資料名:
- EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2005-09
- 発行年:
- 2005
- 開始ページ:
- 203
- 終了ページ:
- 213
- 総ページ数:
- 11
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774277 [1566774276]
- 言語:
- 英語
- 請求記号:
- E23400/200509
- 資料種別:
- 国際会議録
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