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Expanding thermal plasma CVD: Experimental studies of the plasma-surface interaction

著者名:
Van de Sanden, M. C. M.
Creatore, M.
Blauw, M. A.
Hoefiiagels, J. P. M.
Hoex, B.
van den Oever, P. J.
Smets, A. H. M.
Schram, D. C.
Kessels, W. M. M.
さらに 4 件
掲載資料名:
EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2005-09
発行年:
2005
開始ページ:
36
終了ページ:
48
総ページ数:
13
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774277 [1566774276]
言語:
英語
請求記号:
E23400/200509
資料種別:
国際会議録

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