P+/N Junction Formation in Thin Strain Relaxed Buffer Strained Silicon Substrates: The Effect of the Junction Anneal
- 著者名:
Eneman, G. Simoen, E. Delhougne, R. Verheyen, P. Simons, V. Loo, R. Caymax, M. De Meyer, K. Vandervorst, W. Claeys, C. - 掲載資料名:
- ULSI Process Integration : proceedings of the International Symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2005-06
- 発行年:
- 2005
- 開始ページ:
- 338
- 終了ページ:
- 348
- 総ページ数:
- 11
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774642 [1566774640]
- 言語:
- 英語
- 請求記号:
- E23400/200506
- 資料種別:
- 国際会議録
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