51 Structural and Electrical Characterization of Zirconium Oxide Thin Films Deposited by MOCVD
- 著者名:
Lisker, M. Silinskas, M. Matichyn, S. Dargis, R. Kalkofen, B. Burte, E.P. - 掲載資料名:
- Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2005-05
- 発行年:
- 2005
- 開始ページ:
- 418
- 終了ページ:
- 425
- 総ページ数:
- 8
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774635 [1566774632]
- 言語:
- 英語
- 請求記号:
- E23400/200505
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Structural and electrical properties of zirconium oxide layers grown by liquid delivery MOCVD
Electrochemical Society |
Electrochemical Society |
Electrochemical Society | |
Electrochemical Society |
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |