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Layer Transfer and Characterization of SOI and GeOI Substrates

著者名:
Liu, Z.X.
Loryuenyoung, V.
Cheung, N.W.
Schmidt, B.
Chen, P.
Lau, S.S.
さらに 1 件
掲載資料名:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2005-02
発行年:
2005
開始ページ:
96
終了ページ:
105
総ページ数:
10
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774604 [1566774608]
言語:
英語
請求記号:
E23400/200502
資料種別:
国際会議録

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