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Nitrogen Profile and Electrical Properties of Reoxidized Thermally Grown Silicon Nitride

著者名:
Ludsteck, A,
Schulze, J.
Eisele, I.
Dietl, W.
Chung, H.
Nenyei, Z.
Bergmaier, A.
Dollinger, G.
さらに 3 件
掲載資料名:
Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2005-01
発行年:
2005
開始ページ:
232
終了ページ:
241
総ページ数:
10
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774598 [1566774594]
言語:
英語
請求記号:
E23400/200501
資料種別:
国際会議録

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