Blank Cover Image

PECVD Induced Damage on Ultrathin SiO2 Layers

著者名:
掲載資料名:
Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2005-01
発行年:
2005
開始ページ:
74
終了ページ:
85
総ページ数:
12
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774598 [1566774594]
言語:
英語
請求記号:
E23400/200501
資料種別:
国際会議録

類似資料:

G. Cellere, A. Cester, A. Paccagnella

Electrochemical Society

Pantic, Dragan M., Young, Paul G., Williams, Wallace D., Dickman, John E.

National Aeronautics and Space Adminstration

Ceschia, M., Paccagnella, A., Cester, A., Ghidini, G., Wyss, J.

MRS-Materials Research Society

Yasuda, T., Hwang, D. S., Ikuta, K., Yamasaki, S., Tanaka, K.

MRS - Materials Research Society

Cellere, G, Paccagnella, A, Lora, S, Pozza, A, Tao, G, Scarpa, A

ESA Publication Division

Bonneau,F., Combis,P., Vierne,J., Daval,G.

SPIE-The International Society for Optical Engineering

Battaglin G., Russo Lo S., Paccagnella A., Polato P., Principa G.

Kluwer Academic Publishers

Smith, Lee W., Huang, Connick, I-Wen

Materials Research Society

Saha, S., Srinivasan, G., Rezvani, G. A., Farr, M.

MRS - Materials Research Society

Luo,T.Y., Al-Shareef,H.N., Brown,G.A., Laughery,M., Watt,V.H.C., Karamcheti,A., Jackson,M.D., Huff,H.R.

SPIE-The International Society for Optical Engineering

Strijkers, G. J., Swagten, H. J. M., Mettler, A. H. M., Willekens, M. M. H., Jonge, W. J. M. de

MRS - Materials Research Society

Okhonin, S., Ils, A., Bouvet, D., Fazan, P., Guegan, G., Deleonibus, S., Martin, F.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12