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Gas Source Molecular Beam Epitaxy Studies of the Initial Stages of Diamond and Silicon Carbide Growth using Methyl Radicals and Molecular Hydrocarbon Species

著者名:
掲載資料名:
AIChE 1999 ANNUAL MEETING
シリーズ名:
AIChE meeting [papers]
シリーズ巻号:
1999
発行年:
1999
ペーパー番号:
170t
総ページ数:
9
出版情報:
New York: American Institute of Chemical Engineers
言語:
英語
請求記号:
A08000
資料種別:
国際会議録

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