Modeling and Optimization of Chlorine-Activated Diamond Chemical Vapor Deposition

Modeling and Optimization of Chlorine-Activated Diamond Chemical Vapor Deposition

著者名:

Joe, R. ( Rice University, Houston, TX )
Badgwell, T. ( Rice University, Houston, TX )
Hauge, R. ( Rice University, Houston, TX )

掲載資料名:

AIChE ANNUAL MEETING - NOVEMBER 16-21, 1997 - LOS ANGELES, CA

シリーズ名:

AIChE meeting [papers]

シリーズ巻号:

1997

発行年:

1997

ペーパー番号:

202a

総ページ数:

22

出版情報:

New York: American Institute of Chemical Engineers

言語:

英語

請求記号:

A08000

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015166
シリーズID:	PA00000179
会議名:	AIChE Annual Meeting
回次:	1997
会議開催地:	Los Angeles, CA, USA
会議開催年:	1997.11.16-1997.11.21
論文注記:	Fiche 3

類似資料:

1 国際会議録 Modeling Chlorine-Activated Diamond Formation in a Chemical Vapor Deposition Reactor Badgwell, T.A., Kassmann, D.E., Pan, C., Hague, R.H. American Institute of Chemical Engineers	7 国際会議録 Measurement of the Activation Energy in Phosphorous Doped Polycrystalline Diamond Thin Films Grown on Silicon Substrates by Hot Filament Chemical Vapor … Mirzakuchaki, S., Golestanian, H., Charlson, E. J., Stacy, T. MRS - Materials Research Society
2 国際会議録 CHLORINE-ASSISTED CHEMICAL VAPOR DEPOSITION OF DIAMOND FILMS AT LOW TEMPERATURES Komplin, N.J., Bai, B.J., Chu, C.J., Margrave, J.L., Hauge, R.H. Electrochemical Society	8 国際会議録 CHEMICAL VAPOR DEPOSITION OF GOLD Larson, C.E., Baum, T.H., Jackson, R.L. Materials Research Society
3 国際会議録 The Chemical Vapor Deposition of Diamond Yarbrough,W.A., Inspektor,A., Messier,R. Trans Tech Publications	9 国際会議録 OPTIMIZATION TECHNIQUES IN DC ARCJET DIAMOND CHEMICAL VAPOR DEPOSITION Weimer, W.A., Reeve, S.W., Dandy, D.S. Electrochemical Society
4 国際会議録 QUANTITATIVE IN SITU GROWTH MEASUREMENTS OF CHLORINE-ACTIVATED HOMOEPITAXIAL DIAMOND CVD Pan, Chenyu, Margrave, John L., Hauge, Robert H. MRS - Materials Research Society	10 国際会議録 CHEMICAl VAPOR DEPOSITION OF DIAMOND USING FULLERENES FOR DIAMOND NUCLEATION AND GROWTh PRECURSORS Pan, C., Withers, J.C., Stoessel, C.H., Loulfy, R.O. Electrochemical Society
5 国際会議録 Numerical Modelling of Diamond Chemical Vapor Deposition (Invited) Coltrin, M.E., Dandy, D.S. American Institute of Chemical Engineers	11 国際会議録 DEPOSITION OF DIAMOND FILMS ON NICKEL SUBSTRATES BY HOT FILAMENT CHEMICAL VAPOR DEPOSITION Yang, P.C., Zhu, W., Glass, J.T. Electrochemical Society
6 国際会議録 DIAMOND NUCLEATION DURING BIASED CHEMICAL VAPOR DEPOSITION Sheldon, B.W., Boekenhauer, R.E., Shigesato, Y., Rankin, J. Electrochemical Society	12 国際会議録 Uniform Deposition of Chemical Vapor Deposition Diamond Films on Slender Tungsten Wires X.C. Wang, X.T. Shen, T.Q. Zhao, F.H. Sun, B. Shen Trans Tech Publications

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