Determination of Radical and Stable Species Concentrations in PECVD by Molecular-Beam Mass Spectrometry

Determination of Radical and Stable Species Concentrations in PECVD by Molecular-Beam Mass Spectrometry

著者名:

Graff, I.B. ( University of Massachusetts, Amherst, MA )
Westmoreland, P.R. ( University of Massachusetts, Amherst, MA )

掲載資料名:

AIchE 1994 Annual Meeting : November 13-18 San Francisco Hilton and Towers Hotel, San Francisco, California

シリーズ名:

AIChE meeting [papers]

シリーズ巻号:

1994

発行年:

1994

ペーパー番号:

14b

総ページ数:

7

出版情報:

New York: American Institute of Chemical Engineers

言語:

英語

請求記号:

A08000/950031

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015159
シリーズID:	PA00000179
会議名:	AIChE Annual Meeting
回次:	1994
会議開催地:	San Francisco, CA, USA
会議開催年:	1994.11.13-1994.11.18
論文注記:	Fiche 13

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