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Gas/Surface interactions Relevant to Chemical Vapor Deposition Techniques

著者名:
MEYERSON, B. S. ( IBM T.J. WATSON RESEARCH CENTER, YORKTOWN HEIGHTS, NY )  
掲載資料名:
AIChE ANNUAL MEETING -SAN FRANCISCO,CA- 11/25-30,1984
シリーズ名:
AIChE meeting [papers]
シリーズ巻号:
1984
発行年:
1984
ペーパー番号:
10c
総ページ数:
13
出版情報:
New York: American Institute of Chemical Engineers
言語:
英語
請求記号:
A08000
資料種別:
国際会議録

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