CAD tool environment for MEMS process design support

CAD tool environment for MEMS process design support

著者名:

Schmidt, T. ( Univ. of Siegen (Germany) )
Wagener, A. ( Univ. of Siegen (Germany) )
Popp, J. ( Univ. of Siegen (Germany) )
Hahn, K. ( Univ. of Siegen (Germany) )
Bruck, R. ( Univ. of Siegen (Germany) )

掲載資料名:

Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5836

発行年:

2005

開始ページ:

318

終了ページ:

325

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819458315 [0819458317]

言語:

英語

請求記号:

P63600/5836

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015068
シリーズID:	PA00000029
会議名:	Microtechnologies for the New Millennium : Smart Sensors, Actuators, and Mems
回次:	2005 : 2nd
会議開催地:	Seville, Spain
会議開催年:	2005.05.09-2005.05.11

類似資料:

1 国際会議録 Process design and tracking support for MEMS [6109-08] Wagener, A., Schmidt, T., Popp, J., Hahn, K., Bruck, R., Ortloff, D. SPIE - The International Society of Optical Engineering	7 国際会議録 Process management and design for MEMS and microelectronics technologies Hahn, K., Popp, J., Wagener, A. SPIE - The International Society of Optical Engineering
2 国際会議録 Knowledge-based process simulation and design system for MEMS [6035-38] Popp J., Schmidt T., Wagener A., Hahn K., Bruck R., Hossinger A. SPIE - The International Society of Optical Engineering	8 国際会議録 Process design environment for microfabrication technologies Wagener, A., Popp, J., Hahn, K. SPIE - The International Society of Optical Engineering
3 国際会議録 MEMS fabrication process management environment Popp, J., Schmidt, T., Wagener, A., Hahn, K. SPIE - The International Society of Optical Engineering	9 国際会議録 Component-based assiatants for MEMS design tools Hahn,K., Bruck,R., Schneider,C., Schumer,C., Popp,J. SPIE-The International Society for Optical Engineering
4 国際会議録 Management and verification for MEMS fabrication processes [6186-27] Schmidt T., Ortloff D., Hahn K., Wagener A., Popp J., Bruck R. SPIE - The International Society of Optical Engineering	10 国際会議録 Technology interfaces to microsystem and nanoelectronic processes Schmidt, T., Wagener, A., Popp, J., Hahn, K. SPIE - The International Society of Optical Engineering
5 国際会議録 MEMS product engineering using fabrication process development tools K. Hahn, T. Schmidt, D. Ortloff, J. Popp, A. Wagener Society of Photo-optical Instrumentation Engineers	11 国際会議録 Verification of thin film processes in a virtual fabrication environment T. Schmidt, D. Ortloff, J. Popp, K. Hahn, R. Bruck, A. Hossinger SPIE - The International Society of Optical Engineering
6 国際会議録 Optimization of MEMS fabrication process design by virtual experiments T. Schmidt, K. Hahn, T. Binder, J. Popp, A. Wagener, R. Brueck SPIE - The International Society of Optical Engineering	12 国際会議録 Computer-aided design tools for economical MEMS fabrication processes Schneider,C., Priebe,A., Bruck,R., Hahn,K. SPIE - The International Society for Optical Engineering

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