An integrated self-masking technique for providing low-loss metallized RF MEMS devices in a polysilicon only MEMS process (Invited Paper)
- 著者名:
- Wilson, J. M. ( North Carolina State Univ. (USA) )
- Bashirullah, R. ( Univ. of Florida (USA) )
- Nackashi, D. P. ( North Carolina State Univ. (USA) )
- Winick, D. A. ( North Carolina State Univ. (USA) )
- Franzon, P. D. ( North Carolina State Univ. (USA) )
- 掲載資料名:
- Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5836
- 発行年:
- 2005
- 開始ページ:
- 138
- 終了ページ:
- 152
- 総ページ数:
- 15
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819458315 [0819458317]
- 言語:
- 英語
- 請求記号:
- P63600/5836
- 資料種別:
- 国際会議録
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SPIE-The International Society for Optical Engineering |
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SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |