Research on the fabrication of μc-Si and its incubation layer

Research on the fabrication of μc-Si and its incubation layer

著者名:

Li, J. ( Nankai Univ. (China) )

Zhang, X. ( Nankai Univ. (China) )

Wu, C. ( Nankai Univ. (China) )

Liu, J. ( Nankai Univ. (China) )

Zhao, S. ( Nankai Univ. (China) )

Meng, Z. ( Nankai Univ. (China) )

Zhao, Y. ( Nankai Univ. (China) )

Xiong, S. ( Nankai Univ. (China) )

Zhang, L. ( Tianjin Institute of Mechanic and Electric Professional Technology (China) )

さらに 4 件

掲載資料名:

Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5774

発行年:

2004

開始ページ:

442

終了ページ:

445

総ページ数:

4

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819457554 [0819457558]

言語:

英語

請求記号:

P63600/5774

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015002
シリーズID:	PA00000029
会議名:	International Conference on Thin Film Physics and Applications
回次:	2004 : 5th
会議開催地:	Shanghai, China
会議開催年:	2004.05.31-2004.06.02

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