Influences of post-deposition annealing on the properties of the ZrO2 thin films prepared by electron beam evaporation
- 著者名:
- Shao, S. Y. ( Shanghai Institute of Optics and Fine Mechanics. CAS (China) )
- Shao, J. D. ( Shanghai Institute of Optics and Fine Mechanics. CAS (China) )
- Zhang, D. P. ( Shanghai Institute of Optics and Fine Mechanics. CAS (China) )
- Huang, J. B. ( Shanghai Institute of Optics and Fine Mechanics. CAS (China) )
- Fan, Z. X. ( Shanghai Institute of Optics and Fine Mechanics. CAS (China) )
- 掲載資料名:
- Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5774
- 発行年:
- 2004
- 開始ページ:
- 307
- 終了ページ:
- 311
- 総ページ数:
- 5
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457554 [0819457558]
- 言語:
- 英語
- 請求記号:
- P63600/5774
- 資料種別:
- 国際会議録
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