Fabrication of SiGe-on-insulator and applications for strained Si (Invited Paper)
- 著者名:
- Lin, C. ( Shanghai Institute of Microsystem and Information Technology. CAS (China) )
- Liu, W. ( Shanghai Institute of Microsystem and Information Technology. CAS (China) )
- An, Z. ( Shanghai Institute of Microsystem and Information Technology. CAS (China) )
- Di, Z. ( Shanghai Institute of Microsystem and Information Technology. CAS (China) )
- Zhang, M. ( Shanghai Institute of Microsystem and Information Technology. CAS (China) )
- 掲載資料名:
- Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5774
- 発行年:
- 2004
- 開始ページ:
- 136
- 終了ページ:
- 141
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457554 [0819457558]
- 言語:
- 英語
- 請求記号:
- P63600/5774
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
Electrochemical Society |
3
国際会議録
Strained-Si-on-Insulator (SSOI) and SiGe-on-Insulator (SGOI): Fabrication Obstacles and Solutions
Materials Research Society |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society | |
SPIE - The International Society of Optical Engineering |
12
国際会議録
Integrated tool for fabrication of electronic components by laser direct write (Invited Paper)
SPIE-The International Society for Optical Engineering |