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Exploiting hierarchical structure to enhance cell-based RET with localized OPC reconfiguration

著者名:
掲載資料名:
Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5756
発行年:
2005
開始ページ:
361
終了ページ:
367
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457363 [0819457361]
言語:
英語
請求記号:
P63600/5756
資料種別:
国際会議録

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