Lithography simulation system for total CD control from design to manufacturing
- 著者名:
Kotani, T. ( Toshiba Corp. (Japan) ) Ichikawa, H. ( Toshiba Microelectronics Co. (Japan) ) Kobayashi, S. ( Toshiba Corp. (Japan) ) Nojima, S. ( Toshiba Corp. (Japan) ) Izuha, K. ( Toshiba Corp. (Japan) ) Tanaka, S. ( Toshiba Corp. (Japan) ) Inoue, S. ( Toshiba Corp. (Japan) ) - 掲載資料名:
- Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5756
- 発行年:
- 2005
- 開始ページ:
- 219
- 終了ページ:
- 229
- 総ページ数:
- 11
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457363 [0819457361]
- 言語:
- 英語
- 請求記号:
- P63600/5756
- 資料種別:
- 国際会議録
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9
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