Optical extensions integration for a 0.314-μm2 45-nm node 6-transistor SRAM cell
- 著者名:
- Verhaegen, S. ( IMEC vzw(Belgium) )
- Nackaerts, A. ( IMEC vzw(Belgium) )
- Wiaux, V. ( IMEC vzw(Belgium) )
- Hendrickx, E. ( IMEC vzw(Belgium) )
- Vandenberghe, G. ( IMEC vzw(Belgium) )
- 掲載資料名:
- Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5756
- 発行年:
- 2005
- 開始ページ:
- 120
- 終了ページ:
- 130
- 総ページ数:
- 11
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457363 [0819457361]
- 言語:
- 英語
- 請求記号:
- P63600/5756
- 資料種別:
- 国際会議録
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10
国際会議録
Performance of immersion lithography for 45-nm-node CMOS and ultra-high density SRAM with 0.25um2
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