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Optimization of multi-step development scheme to improve the critical dimension uniformity

著者名:
  • Chang, H. ( United Microelectronics Corp. (Taiwan) )
  • Lin, B. S. -M. ( United Microelectronics Corp. (Taiwan) )
  • Hung, K. -C. ( United Microelectronics Corp. (Taiwan) )
  • Fang, S. -P. ( United Microelectronics Corp. (Taiwan) )
  • Hsu, T. ( United Microelectronics Corp. (Taiwan) )
掲載資料名:
Data analysis and modeling for process control II : 3-4 March, 2005, San Jose, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5755
発行年:
2005
開始ページ:
251
終了ページ:
259
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457356 [0819457353]
言語:
英語
請求記号:
P63600/5755
資料種別:
国際会議録

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