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Novel chemical shrinkage material for small contact hole and small space patterning

著者名:
Whittaker, A. K. ( The Univ. of Queensland (Australia) )
Blakey, I. ( The Univ. of Queensland (Australia) )
Liu, H. ( The Univ. of Queensland (Australia) )
Hill, D. J. T. ( The Univ. of Queensland (Australia) )
George, G. A. ( Queensland Univ. of Technology (Australia) )
Conley, W. ( SEMATECH, Inc. (USA) )
Zimmerman, P. ( SEMATECH, Inc. (USA) )
さらに 2 件
掲載資料名:
Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5753(1)
発行年:
2005
パート:
1
開始ページ:
214
終了ページ:
221
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457332 [0819457337]
言語:
英語
請求記号:
P63600/5753-1
資料種別:
国際会議録

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