Performance study of CD mark size for angular scatterometry
- 著者名:
Kang, H. C. ( Somsung Electronics Co., Lfd. (South Korea) ) Lim, J. T. ( Somsung Electronics Co., Lfd. (South Korea) ) Choi, J. S. ( Somsung Electronics Co., Lfd. (South Korea) ) Lee, T. Y. ( Somsung Electronics Co., Lfd. (South Korea) ) Lee, B. H. ( Somsung Electronics Co., Lfd. (South Korea) ) Chin, S. B. ( Somsung Electronics Co., Lfd. (South Korea) ) Cho, D. H. ( Somsung Electronics Co., Lfd. (South Korea) ) - 掲載資料名:
- Metrology, Inspection, and Process Control for Microlithography XIX
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5752
- 発行年:
- 2005
- 開始ページ:
- 59
- 終了ページ:
- 66
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457325 [0819457329]
- 言語:
- 英語
- 請求記号:
- P63600/5752-1
- 資料種別:
- 国際会議録
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