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Arrayed microcolumns for high throughput lithography

著者名:
Hayden, P. ( Univ. College Dublin (Ireland) )
Cummings, A. ( Univ. College Dublin (Ireland) )
Gaynor, L. ( Univ. College Dublin (Ireland) )
Murphy, N. ( Univ. College Dublin (Ireland) )
O'Sullivan, G. ( Univ. College Dublin (Ireland) )
Sheridan, P. ( Univ. College Dublin (Ireland) )
Sokell, E. ( Univ. College Dublin (Ireland) )
White, J. ( Univ. College Dublin (Ireland) )
Dunne, P. ( Univ. College Dublin (Ireland) )
さらに 4 件
掲載資料名:
Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5751
発行年:
2005
開始ページ:
340
終了ページ:
348
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457318 [0819457310]
言語:
英語
請求記号:
P63600/5751-1
資料種別:
国際会議録

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