Zone-plate-array lithography (ZPAL): optical maskless lithography for cost-effective patterning
- 著者名:
Rettig, C. L. ( Cymer, Inc. (USA) ) Khodykin, O. V. ( Cymer, Inc. (USA) ) Hoffman, J. R. ( Cymer, Inc. (USA) ) Marx, W. F. ( Cymer, Inc. (USA) ) Bowering, N. R. ( Cymer, Inc. (USA) ) Vargas, E. ( Cymer, Inc. (USA) ) Ershov, A. I. ( Cymer, Inc. (USA) ) Fomenkov, I. V. ( Cymer, Inc. (USA) ) Partlo, W. N. ( Cymer, Inc. (USA) ) - 掲載資料名:
- Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5751
- 発行年:
- 2005
- 開始ページ:
- 330
- 終了ページ:
- 339
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457318 [0819457310]
- 言語:
- 英語
- 請求記号:
- P63600/5751-1
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
12
国際会議録
Low cost of ownership KrF excimer laser using a novel pulse power and chamber configuration
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