Fabrication techniques for low-loss silicon nitride waveguides
- 著者名:
- Shaw, M.J. ( Sandia National Labs. (USA) )
- Guo, J. ( Sandia National Labs. (USA) )
- Vawter, G.A. ( Sandia National Labs. (USA) )
- Habermehl, S. ( Sandia National Labs. (USA) )
- Sullivan, C.T. ( Sandia National Labs. (USA) )
- 掲載資料名:
- Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San JOse, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5720
- 発行年:
- 2005
- 開始ページ:
- 109
- 終了ページ:
- 118
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456946 [0819456942]
- 言語:
- 英語
- 請求記号:
- P63600/5720
- 資料種別:
- 国際会議録
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