Design and fabrication of pitch-tunable blaze grating

Design and fabrication of pitch-tunable blaze grating

著者名:

Yang, Y.-S. ( National Tsing Hua Univ. (Taiwan) )
Liu, C.-H. ( National Tsing Hua Univ. (Taiwan) )

掲載資料名:

MEMS/MOEMS Components and Their Applications II

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5717

発行年:

2005

開始ページ:

99

終了ページ:

107

総ページ数:

9

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456915 [0819456918]

言語:

英語

請求記号:

P63600/5717

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014934
シリーズID:	PA00000029
会議名:	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MEMS/MOEMS Components and Their Applications
回次:	2005 : 2nd
会議開催地:	San Jose, CA, USA
会議開催年:	2005.01.24-2005.01.25

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