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Backside preparation and failure analysis for packaged microelectromechanical systems (MEMS)

著者名:
Walraven, J.A. ( Sandia National Labs. (USA) )
Cole, E.l. ( Sandia National Labs. (USA) )
Barr, Jr.D.L. ( Sandia National Labs. (USA) )
Anderson, R.E. ( Sandia National Labs. (USA) )
Kilgo, A. ( Sandia National Labs. (USA) )
Maciel, J.J. ( Radant MEMS, Inc. (USA) )
Morrison, R. ( Radant MEMS, Inc. (USA) )
Karabudak, N.N. ( Lockheed Martin Space Systems (USA) )
さらに 3 件
掲載資料名:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5716
発行年:
2005
開始ページ:
165
終了ページ:
172
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456908 [081945690X]
言語:
英語
請求記号:
P63600/5716
資料種別:
国際会議録

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