Improved near-infrared luminescence of Si-rich SiO2 with buried SI nanocrystals grown by PECVD at optimized N20 fluence
- 著者名:
Chen, C.-Y. ( National Chiao Tung Univ. (Taiwan) ) Lin, C.-J. ( National Chiao Tung Univ. (Taiwan) ) Kuo, H.-C. ( National Chiao Tung Univ. (Taiwan) ) Lin, G.-R. ( National Chiao Tung Univ. (Taiwan) ) Chueh, Y.-L. ( National Tsing Hua Univ. (Taiwan) ) Chou, L.-J. ( National Tsing Hua Univ. (Taiwan) ) Chang, C.-W. ( National Chiao Tung Univ. (Taiwan) ) Diau, E.W.-G. ( National Chiao Tung Univ. (Taiwan) ) - 掲載資料名:
- Photon Processing in Microelectronics and Photonics IV
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5713
- 発行年:
- 2005
- 開始ページ:
- 592
- 終了ページ:
- 599
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456878 [081945687X]
- 言語:
- 英語
- 請求記号:
- P63600/5713
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
Electrochemical Society |
Materials Research Society |
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Materials Research Society |
Materials Research Society |
4
国際会議録
Analysis of silicon nanocrystal in silicon-rich SIO2 synthesized by CO2 laser annealing [6020-72]
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
MRS - Materials Research Society |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |