Formation of self-organized regular nanostructures upon femtosecond laser ablation
- 著者名:
Reif, J. ( Brandenburgische Technische Univ. Cottbus(Germany), IHP/BTU Jointlab(Germany) ) Costache, F. ( Brandenburgische Technische Univ. Cottbus(Germany), IHP/BTU Jointlab(Germany) ) Eckert, S. ( Brandenburgische Technische Univ. Cottbus(Germany) ) Kouteva-Arguirova, S. ( Brandenburgische Technische Univ. Cottbus(Germany), IHP/BTU Jointlab(Germany) ) Bestehorn, M. ( Brandenburgische Technische Univ. Cottbus(Germany) ) Georgescu, I. ( Max-Planck Institut fur Physik komplexer Systeme(Germany) ) Semerok, A. F. ( CEA Saclay(France) ) Martin, P. ( CEA Saclay(France) ) Gobert, O. ( CEA Saclay(France) ) Seifert, W. ( IHP/BTU Jointlab(Germany), Innovations for High Performance Microelectronics(Germany) ) - 掲載資料名:
- Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5662
- 発行年:
- 2004
- 開始ページ:
- 737
- 終了ページ:
- 742
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456236 [0819456233]
- 言語:
- 英語
- 請求記号:
- P63600/5662
- 資料種別:
- 国際会議録
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Femtosencond laser ablation of metals: precise measurement and analytical model for crater profiles
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