Low resistivity glass metallization by laser induced plasma-assisted ablation(LIPAA)
- 著者名:
Hong, M. H. ( Data Storage Institute(Singapore), National Univ. of Singapore(Singapore) ) Xie, Q. ( Data Storage Institute(Singapore) ) Lim, B. C. ( National Univ. of Singapore(Singapore) ) Sugioka, K. ( RIKEN-The Institute of Physical and Chemical Research(Japan) ) Midorikawa, K. ( RIKEN-The Institute of Physical and Chemical Research(Japan) ) Ye, K. D. ( Data Storage Institute(Singapore) ) Shi, L. P. ( Data Storage Institute(Singapore) ) Chong, T. C. ( Data Storage Institute(Singapore), National Univ. of Singapore(Singapore) ) - 掲載資料名:
- Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5662
- 発行年:
- 2004
- 開始ページ:
- 532
- 終了ページ:
- 537
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456236 [0819456233]
- 言語:
- 英語
- 請求記号:
- P63600/5662
- 資料種別:
- 国際会議録
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