Polygon microlens array design and fabrication using thermal pressing in LIGA-like process
- 著者名:
- Shyu, R. F. ( National Huwei Univ. of Science and Technology (Taiwan) )
- Yang, H. ( National Chung Hsing Univ. (Taiwan) )
- Ho, C.-T. ( National Huwei Univ. of Science and Technology (Taiwan) )
- Hsieh, W.-H. ( National Huwei Univ. of Science and Technology (Taiwan) )
- Weng, F.-T. ( National Huwei Univ. of Science and Technology (Taiwan) )
- 掲載資料名:
- Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5650
- 発行年:
- 2004
- 開始ページ:
- 305
- 終了ページ:
- 312
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456106 [0819456101]
- 言語:
- 英語
- 請求記号:
- P63600/5650
- 資料種別:
- 国際会議録
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