Surface acoustic wave based ozone sensor with an InOx/Si3N4/36°YX LiTaO3 structure

Surface acoustic wave based ozone sensor with an InOx/Si3N4/36°YX LiTaO3 structure

著者名:

Fechete, A. C. ( RMIT Univ. (Australia) and CRC for microTechnology (Australia) )
Ippalito, S. J. ( RMIT Univ. (Australia) and CRC for microTechnology (Australia) )
Kalantar-Zadeh, K. ( RMIT Univ. (Australia) and CRC for microTechnology (Australia) )
Wlodarski, W. ( RMIT Univ. (Australia) and CRC for microTechnology (Australia) )
Halland, A. S. ( RMIT Univ. (Australia) )

掲載資料名:

Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5650

発行年:

2004

開始ページ:

268

終了ページ:

275

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456106 [0819456101]

言語:

英語

請求記号:

P63600/5650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014867
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Micro- and Nanotechnology
回次:	2004 : 2nd
会議開催地:	Sydney, Australia
会議開催年:	2004.12.13-2004.12.15

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