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Structure design of Si-based M-Z interference acceleration seismic geophone

著者名:
Wu, B. ( Tianjin Univ. (China) )
Chen, C. ( Tianjin Univ. (China) )
Zhang, X. ( Tianjin Univ. (China) )
Cui, Y. ( Tianjin Univ. (China) )
Ma, G. ( Tianjin Univ. (China) )
Zhang, Y. ( Tianjin Univ. (China) )
Zhong, J. ( Tianjin Univ. (China) )
さらに 2 件
掲載資料名:
MEMS/MOEMS Technologies and Applications II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5641
発行年:
2004
開始ページ:
19
終了ページ:
25
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455963 [0819455962]
言語:
英語
請求記号:
P63600/5641
資料種別:
国際会議録

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