Fast data acquisition in imaging ellipsometry using tour-frame method
- 著者名:
- Chegal, W. ( Korea Research Institute of Standards and Science (South Korea) )
- Cho, Y. J. ( Korea Research Institute of Standards and Science (South Korea) )
- Cho, H. M. ( Korea Research Institute of Standards and Science (South Korea) )
- Lee, Y. W. ( Korea Research Institute of Standards and Science (South Korea) )
- Kim, S. H. ( Korea Advanced Institute of Science and Technology (South Korea) )
- 掲載資料名:
- Advanced sensor systems and applications II : 8-12 November 2004, Beijing, China
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5634
- 発行年:
- 2004
- 開始ページ:
- 839
- 終了ページ:
- 848
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819455895 [081945589X]
- 言語:
- 英語
- 請求記号:
- P63600/5634-2
- 資料種別:
- 国際会議録
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