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Integrated poly-SiGe nanomechanical resonators for wireless sensor nodes (Invited Paper)

著者名:
掲載資料名:
Nanosensing: Materials and Devices
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5593
発行年:
2004
開始ページ:
368
終了ページ:
377
総ページ数:
10
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455468 [0819455466]
言語:
英語
請求記号:
P63600/5593
資料種別:
国際会議録

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