Phase-defocus windows for alternating phase-shifting mask
- 著者名:
Liang, F. -J. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) ) Chen, C. -K. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) ) Shin, J. -J. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) ) You, J. -W. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) ) Lin, C. -H. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) ) Pan, Z. -Y. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) ) Shu, K. -C. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) ) Gau, T. -S. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) ) Lin, B. J. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) ) - 掲載資料名:
- 24th Annual BACUS Symposium on Photomask Technology
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5567
- 発行年:
- 2004
- 開始ページ:
- 406
- 終了ページ:
- 415
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819455130 [081945513X]
- 言語:
- 英語
- 請求記号:
- P63600/5567-1
- 資料種別:
- 国際会議録
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7
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SPIE-The International Society for Optical Engineering |
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