Azimuth calibration method in ellipsometer with imaging spectrograph
- 著者名:
Chegal, W. ( Korea Research Institute of Standards and Science (South Korea) ) Cho, Y.J. ( Korea Research Institute of Standards and Science (South Korea) ) Kim, H.J. ( Korea Research Institute of Standards and Science (South Korea) ) Cho, H.M. ( Korea Research Institute of Standards and Science (South Korea) ) Lee, Y.W. ( Korea Research Institute of Standards and Science (South Korea) ) Kim, S.H. ( Korea Advanced Institute of Science and Technology (South Korea) ) - 掲載資料名:
- Imaging spectrometry X : 2-4 August 2004, Denver, Colorado, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5546
- 発行年:
- 2004
- 開始ページ:
- 400
- 終了ページ:
- 405
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819454843 [0819454842]
- 言語:
- 英語
- 請求記号:
- P63600/5546
- 資料種別:
- 国際会議録
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6
国際会議録
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