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Vibration diagnosis and remediation design for an x-ray optics stitching interferometer system

著者名:
掲載資料名:
Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5533
発行年:
2004
開始ページ:
131
終了ページ:
139
総ページ数:
9
出版情報:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819454713 [0819454710]
言語:
英語
請求記号:
P63600/5533
資料種別:
国際会議録

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