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Active microinterferometer with liquid crystal on silicon (LCOS) for extended range static and dynamic micromembrane measurement

著者名:
掲載資料名:
Interferometry XII: Applications
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5532
発行年:
2004
開始ページ:
37
終了ページ:
43
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819454706 [0819454702]
言語:
英語
請求記号:
P63600/5532
資料種別:
国際会議録

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