Production challenges of making an EUV mask blank(Invited Paper)
- 著者名:
Aschke, L. ( Schott Lithotec AG(Germany) ) Becker, H. W. ( Schott Lithotec AG(Germany) ) Friemel, F. ( Schott Lithotec AG(Germany) ) Leutbecher, T. ( Schott Lithotec AG(Germany) ) Olschewski, N. ( Schott Lithotec AG(Germany) ) Renno, M. ( Schott Lithotec AG(Germany) ) Ruggeberg, F. ( Schott Lithotec AG(Germany) ) Schiffler, M. ( Schott Lithotec AG(Germany) ) Schmidt, F. ( Schott Lithotec AG(Germany) ) Sobel, F. ( Schott Lithotec AG(Germany) ) Walter, K. ( Schott Lithotec AG(Germany) ) Heβ, G. ( Schott Lithotec AG(Germany) ) Lenzen, F. ( Schott Lithotec AG(Germany) ) Knapp, K. ( Schott Lithotec AG(Germany) ) Alkemper, J. ( Schott Glas(Germany) ) Hack, H. ( Schott Glas(Germany) ) Megges, K. ( Schott Glas(Germany) ) Mitra, I. ( Schott Glas(Germany) ) Muller, R. ( Schott Glas(Germany) ) Nolte, U. ( Schott Glas(Germany) ) Schumacher, J. ( Schott Glas(Germany) ) Pannhorst, W. ( Schott Glas(Germany) ) - 掲載資料名:
- 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5504
- 発行年:
- 2004
- 開始ページ:
- 94
- 終了ページ:
- 104
- 総ページ数:
- 11
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819454379 [0819454370]
- 言語:
- 英語
- 請求記号:
- P63600/5504
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |