An optical workstation for characterization and modification of MEMS

An optical workstation for characterization and modification of MEMS

著者名:

Hedley, J. ( Univ. of Newcastle upon Tyne (United Kingdom) )

Burdess, J. S. ( Univ. of Newcastle upon Tyne (United Kingdom) )

Harris, A. J. ( Univ. of Newcastle upon Tyne (United Kingdom) )

Gallacher, B. J. ( Univ. of Newcastle upon Tyne (United Kingdom) )

McNeil, C. J. ( Univ. of Newcastle upon Tyne (United Kingdom) )

Cumpson, P. J. ( National Physical Lab. (United Kingdom) )

Enderling, S. ( Univ. of Edinburgh (United Kingdom) )

さらに 2 件

掲載資料名:

Optical Micro- and Nanometrology in Manufacturing Technology

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5458

発行年:

2004

開始ページ:

244

終了ページ:

252

総ページ数:

9

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819453808 [0819453803]

言語:

英語

請求記号:

P63600/5458

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014649
シリーズID:	PA00000029
会議名:	Photonics Europe : Optical micro- and nanometrology in manufacturing technology
回次:	2004
会議開催地:	Strasbourg, France
会議開催年:	2004.04.29-2004.04.30

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4 国際会議録 A hybrid MEMS-based microfluidic system for cancer diagnosis P. Ortiz, N. Keegan, J. Spoors, J. Hedley, A. Harris Society of Photo-optical Instrumentation Engineers	10 国際会議録 Measurement precision of optical scatterometry Logofatu,P.C., McNeil,J.R. SPIE-The International Society for Optical Engineering
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