Combined interference and scanning force microscope

Combined interference and scanning force microscope

著者名:

Danzebrink, H. U. ( Physikalisch-Technische Bundesanstalt (Germany) )
Tyrrell, J. W. G. ( Physikalisch-Technische Bundesanstalt (Germany) )
Dal Savio, C. ( Physikalisch-Technische Bundesanstalt (Germany) )
Kruger-Sehm, R. ( Physikalisch-Technische Bundesanstalt (Germany) )

掲載資料名:

Optical Metrology in Production Engineering

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5457

発行年:

2004

開始ページ:

158

終了ページ:

165

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819453792 [081945379X]

言語:

英語

請求記号:

P63600/5457

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014648
シリーズID:	PA00000029
会議名:	Photonics Europe : Optical metrology in production engineering
回次:	2004
会議開催地:	Strasbourg, France
会議開催年:	2004.04.27-2004.04.30

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